ASML’s pricing follows technology generations, with each step representing roughly a 2x increase in cost while delivering proportionally more transistor density and manufacturing capability.
DUV (Deep Ultraviolet): $5-90 million per machine. Legacy technology but still 60% of ASML’s unit volume with 374 machines sold in 2024. These serve mature nodes and markets like automotive and IoT where cutting-edge manufacturing is not required.
EUV (Extreme Ultraviolet): $183-220 million per machine. Only 44 sold in 2024, but accounting for 38% of system sales revenue. Enables 7nm to 3nm production. ASML sold 44 EUV machines last year with a price tag starting at $220 million.
High NA EUV: $350-400 million per machine. ASML’s cutting-edge High-NA extreme ultraviolet chipmaking tools will cost around $380 million each, over twice as much as existing Low-NA EUV lithography systems. Target production is 20 units annually by 2028. Enables sub-2nm nodes.
Hyper NA EUV (2030+): The expected cost for Hyper-NA EUV could exceed $724 million, approximately twice the High NA price. This has caused TSMC, Samsung, and Intel to hesitate on adoption timelines.
The Value Proposition
The economics work because each generation does not just cost more but delivers more. The High-NA EUV technology represents a major breakthrough, enabling an improved 8nm imprint resolution compared to 13nm with current Low-NA EUV tools.
This allows chipmakers to produce transistors that are nearly 1.7 times smaller, translating to a threefold increase in transistor density on chips. Customers pay 2x the machine price but potentially recover the cost through higher yields, faster throughput, and reduced mask costs.
Gennaro is the creator of FourWeekMBA, which reached about four million business people, comprising C-level executives, investors, analysts, product managers, and aspiring digital entrepreneurs in 2022 alone | He is also Director of Sales for a high-tech scaleup in the AI Industry | In 2012, Gennaro earned an International MBA with emphasis on Corporate Finance and Business Strategy.
